Effect of Methane Pressure on the Size of Carbon Nanoparticles Deposited by Pulsed Plasma Enhanced Chemical Vapor Deposition

The nanoparticles of carbon were deposited from methane under the potential of a pulsed direct current discharge. The deposition was carried without external heating. The size, chemistry, and structure of carbon nanoparticles were characterized using transmission electron microscopy (TEM), X-ray diffraction (XRD), Raman and Fourier transform infrared (FTIR) spectroscopy. The minimum size of the nanoparticles